Evaluation for diaphragm's deflection for touch mode MEMS pressure sensors

نویسندگان

  • Yadollah Hezarjaribi
  • Mohd Hamidon
  • Roslina Mohd Sidek
  • Keshmiri Hossein
  • Raja Abdullah
  • Alireza Bahadorimehr
چکیده

In this paper, an analytical and simulation solution for touch mode Micro-electromechanical systems pressure sensor operating in harsh environment is proposed. The principle of the paper is to design, obtain analytical solution and compare the results with the simulation using finite elements analysis for a circular diaphragm deflection before and after touch point. By looking at MEMS devices, when the diaphragm starts touching the fixed electrode by applying loads, it will have a major effect on the overall performance of the device. Therefore, one should consider the effect of touch mode in the system to achieve good linearity, large operating pressure range and large overload protection at output. As of so far the effect of touch mode has not been evaluated efficiently in the literatures. The proposed touch mode MEMS capacitive pressure sensor demonstrated diaphragm with radius of 180 μ m , the gap depth of 0.5 μ m and the sensor exhibit a linear response with pressure from 0.05 Mpa to 2 Mpa.

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Analytical and Simulation Evaluation for Diaphragm’s Deflection and its Applications to Touch Mode MEMS Capacitive Pressure Sensors

In this paper, An analytical and simulation solution for touch mode Micro-electromechanical systems (MEMS) capacitive pressure sensor operating in harsh environment is proposed, The principle of the paper is to design, obtain analytical solution and compare the results with the simulation using coventor software for a circular diaphragm deflection before and after touch point. The material is c...

متن کامل

Accurate Model of Capacitance for MEMS Sensors using Corrugated Diaphragm with Residual Stress

In this paper we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematic expressions for central deflection of corrugated diaphragm and its relationship with residual stres...

متن کامل

Simulation and Derivation of Deflection Equation for Suspended Diaphragm for MEMS Application Using Kirchhoff-Love Theory

In this paper, using theory of sheets, the deflection of suspended diaphragm has been obtained under uniform and circular loading. This type of diaphragm, unlike other diaphragms, has a central support which is recommended to be used in MEMS applications. The relationship between diaphragm deflection and static analysis of this diaphragm enjoys a great significance in investigating and understa...

متن کامل

New Design of Mems piezoresistive pressure sensor

The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...

متن کامل

Analytical Speedup for the Optimal Design of MEMS Touch Mode Capacitive Pressure Sensors

Obtaining an optimal design for micro electro-mechanical systems (MEMS) structures is a computationally-intensive and time-consuming task as it usually involves numerous non-linear finite-element method (FEM) simulations. This work presents an analytical method to achieve a near-optimal design for circular diaphragm touch mode capacitive pressure sensors and thus find an optimal design without ...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

عنوان ژورنال:
  • Int. Arab J. Inf. Technol.

دوره 8  شماره 

صفحات  -

تاریخ انتشار 2011